| 摘要 |
PROBLEM TO BE SOLVED: To prevent a ferroelectric film from being deteriorated, and to prevent the reliability of a wiring film from being decreased in a ferroelectric element. SOLUTION: The ferroelectric element comprises a first electrode 3, the ferroelectric film 4 formed on the first electrode 3, a second electrode 5 formed on the ferroelectric film 4, a first hydrogen approach prevention film 8 directly formed on the surface of the second electrode 5, a first insulating film 11 formed on the first hydrogen approach prevention film 8, a first opening 10 formed in the first hydrogen approach prevention film 8 for exposing one portion of the second electrode 5, a second opening 13 formed in the first insulating film 11 with a opening diameter that is larger than the first opening 10, and the wiring film 14 connected to the second electrode 5 via the first and second openings 10, 13. COPYRIGHT: (C)2005,JPO&NCIPI
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