SURFACE INSPECTION APPARATUS, SURFACE INSPECTION PROGRAM, AND SURFACE INSPECTION METHOD

摘要

PROBLEM TO BE SOLVED: To provide a surface inspection apparatus, or the like, for accurately inspecting the surface of a subject to be inspected. SOLUTION: The surface inspection apparatus comprises an inspection image data acquiring means for acquiring the image data of the subject to be inspected by irradiating the subject with light; a first inclination displacement acquiring means for acquiring the inclination displacement of the subject to be inspected, when acquiring the inspection image data; a first inclination displacement-dependent data acquiring means for acquiring the correlation relation between the inclination displacement of a reference subject and the reflection variable of light in reference image data, acquired by irradiating the reference subject with light as first inclination displacement-dependent data in advance; and a first correction means for correcting the inspection image data, on the basis of the first inclination displacement-dependent data and the measured inclination displacement. COPYRIGHT: (C)2005,JPO&NCIPI