| 摘要 |
PROBLEM TO BE SOLVED: To reduce an influence of fluctuations based on a fluctuation of the emission power of an infrared light source caused by a supply voltage or a concentration change of sealed gas or the like, or an output fluctuation caused by a period fluctuation of an optical sector. SOLUTION: This infrared gas analyzer comprises a first light receiving chamber entered by a measuring beam transmitted through a sample gas including gas to be analyzed, a second light receiving chamber arranged on a comparison beam path and entered by the comparison beam not receiving substantially infrared absorption, a gas passage communicating the first and second light receiving chambers, and a flow sensor arranged in the gas passage, the first and second light receiving chambers being filled with the same kind gas as the gas to be analyzed. The analyzer further comprises a gas absorption signal detection means for filling the same kind of gas as the gas to be analyzed in the first and second light receiving chambers, allowing the measuring beam and the comparison beam to enter the first and second light receiving chambers periodically and intermittently, and detecting by the flow sensor a gas flow in the gas passage based on pressure fluctuation in the first and second light receiving chambers generated at that time, and a compensation means provided with an infrared sensor for measuring the emission power of the comparison beam entering the first and second light receiving chambers, for compensating a fluctuation portion of a gas cell signal based on a signal from the infrared sensor. COPYRIGHT: (C)2005,JPO&NCIPI
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