| 摘要 |
PROBLEM TO BE SOLVED: To provide heating equipment for film deposition material which can rapidly raise the temperature of the film deposition material stored in a crucible to a prescribed temperature from the start of heating at the time of performing heating to the film deposition material and can provide the film deposition material with uniform temperature portions over the respective portions thereof and a heating method for the film deposition material. SOLUTION: An aperture 12 is disposed in the upper part of an opening of the crucible 10 formed to a closed-end cylindrical shape. An element substrate c is disposed above the same by maintaining a prescribed distance, A bobbin 11 to fit onto the outer periphery of the crucible 10 is disposed in tight contact therewith and a coil 13 is embedded into the bobbin 11. The film deposition material 14 is stored in the crucible 10. The organic material for forming a film on the display surface plate of an organic EL color display and the particles to be heated which are composed of the fine powder of the dielectric material to generate eddy current and to generat heat by accompanying the same when a high-frequency magnetic field is applied thereto, are mixed. COPYRIGHT: (C)2005,JPO&NCIPI
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