APPARATUS FOR FEEDING AND RETURNING WAFER RING,申请号KR20020023204-传众专利搜索

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发明名称	APPARATUS FOR FEEDING AND RETURNING WAFER RING
摘要
申请公布号	KR100482866(B1)	申请公布日期	2005.04.14
申请号	KR20020023204	申请日期	2002.04.27
申请人		发明人
分类号	H01L21/68;B65G49/07;H01L21/52;H01L21/677;(IPC1-7):H01L21/68	主分类号	H01L21/68
代理机构		代理人
主权项
地址

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