| 摘要 |
PROBLEM TO BE SOLVED: To provide a charged particle beam device which can prevent the moving of the center of image of an observation image certainly even in the case a rotation angle rotating at one time is large, and a control method of the charged particle beam device. SOLUTION: This charged particle beam device comprises a charged particle beam source 1, an electronic optical system 50 for irradiating charged particle beams 7 emitted from the charged particle beam source 1 to a testpiece 6, an image acquisition means for acquiring the information of the testpiece 6 as an image, and a testpiece stage 5 for supporting the testpiece. The testpiece stage 5 is capable of moving in X-Y directions and is capable of rotating centered on a prescribed axis of rotation, and the moving speed of the testpiece stage 5 is controlled according to a sine value or a cosine value of an angle formed by a line connecting the axis of rotation and a position on the testpiece 6 corresponding to the center of the image and the reference axis of coordinates of coordinates centered on the axis of the rotation. COPYRIGHT: (C)2005,JPO&NCIPI
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