SYSTEM AND METHOD FOR USING FIRST-PRINCIPLES SIMULATION TO ANALYZE A PROCESS PERFORMED BY A SEMICONDUCTOR PROCESSING TOOL

摘要

A method, system and computer readable medium for analyzing a process performed by a semiconductor processing tool. The method includes inputting data relating to a process performed by the semiconductor processing tool, and inputting a first principles physical model relating to the semiconductor processing tool. First principles simulation is performed using the input data and the physical model to provide a first principles simulation result; and the first principles simulation result is used to determined a fault in the process performed by the semiconductor processing tool.