| 摘要 |
PROBLEM TO BE SOLVED: To provide an apparatus for manufacturing a vapor-deposited article, which has an evaporation source capable of stably evaporating a material for a long period, and shows a superior throughput. SOLUTION: The evaporation source in a vapor deposition apparatus has an actuator for moving a crucible up and down. When a vapor-depositing material is plugged in the opening of the crucible, the actuator moves a crucible down into the inner part of the evaporation source, and encloses it therein. Then, the vapor-depositing material having plugged the opening is efficiently heated by a heater to vaporize because of such an efficient structure in the evaporating source as to heat the opening, which eliminates the plugging. Afterwards, the actuator moves a crucible upward, and the vapor deposition apparatus performs vapor deposition while heating the crucible. Thereby, the vapor deposition apparatus can perform film formation for a long period of time without opening the inner part to the atmosphere, and improves the productivity in producing an organic electroluminescence element. COPYRIGHT: (C)2005,JPO&NCIPI
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