| 摘要 |
PROBLEM TO BE SOLVED: To provide substrate treatment equipment wherein conveyance course of a substrate can be analyzed easily. SOLUTION: The substrate treatment equipment is provided with a conveyance mechanism which conveys a substrate along a plurality of conveyance ways in order to treat the substrate, a storage which holds history information showing that the substrate is treated through which conveyance way out of a plurality of the conveyance ways, and a display unit which displays the history information while displaying a conveyance way corresponding to the history information by using an image. COPYRIGHT: (C)2005,JPO&NCIPI
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