发明名称 |
METHOD FOR REMOVAL OF HYDROCARBON CONTAMINATION ON GATE OXIDE PRIOR TO NON-THERMAL NITRIDATION USING SPIKE RADICAL OXIDATION |
摘要 |
The present invention is generally directed towards a method for removing hydrocarbon contamination from a substrate prior to a nitridation step, therein providing for a generally uniform nitridation of the substrate. The method comprises placing the substrate in a process chamber and flowing an oxygen-source gas into the process chamber. A first plasma is formed in the process chamber for a first predetermined amount of time, wherein the hydrocarbons combine with one or more species of the oxygen-source gas in radical form to form product gases. The gases are removed from the process chamber and a nitrogen-source gas is flowed into the process chamber. A second plasma is then formed in the process chamber for a second predetermined amount of time, therein nitriding the substrate in a significantly uniform manner.
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申请公布号 |
US2005079723(A1) |
申请公布日期 |
2005.04.14 |
申请号 |
US20030684897 |
申请日期 |
2003.10.14 |
申请人 |
NIIMI HIROAKI;ALSHAREEF HUSAM N.;VARGHESE AJITH |
发明人 |
NIIMI HIROAKI;ALSHAREEF HUSAM N.;VARGHESE AJITH |
分类号 |
H01L21/20;H01L21/28;H01L21/302;H01L21/306;H01L21/31;H01L21/314;H01L21/316;H01L21/36;(IPC1-7):H01L21/20 |
主分类号 |
H01L21/20 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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