| 发明名称 |
Hollow tip array with nanometer size openings and formation thereof |
| 摘要 |
This invention provides tip assemblies and arrays of tip assemblies useful for nanoscale fluid delivery. The invention also provides methods of fabricating tip assemblies.
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| 申请公布号 |
US2005079711(A1) |
申请公布日期 |
2005.04.14 |
| 申请号 |
US20030683247 |
申请日期 |
2003.10.10 |
| 申请人 |
CABOT MICROELECTRONICS CORP. |
发明人 |
BUSTA HEINZ H. |
| 分类号 |
B01L3/02;B41J2/14;B41J2/16;B81B1/00;B81B3/00;(IPC1-7):H01L21/302;H01L21/461 |
主分类号 |
B01L3/02 |
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| 主权项 |
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