发明名称 |
Compliant contact structures, contactor cards and test system including same, and methods of fabrication and use |
摘要 |
A compliant contact structure and contactor card for operably coupling with a semiconductor device to be tested includes a substantially planar substrate with a compliant contact formed therein. The compliant contact structure includes a portion fixed within the substrate and at least another portion integral with the fixed portion, laterally unsupported within a thickness of the substrate and extending beyond a side thereof. Dual-sided compliant contact structures, methods of forming compliant contact structures, a method of testing a semiconductor device and a testing system are also disclosed.
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申请公布号 |
US2005077913(A1) |
申请公布日期 |
2005.04.14 |
申请号 |
US20030684621 |
申请日期 |
2003.10.14 |
申请人 |
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发明人 |
WATKINS CHARLES M.;KIRBY KYLE K. |
分类号 |
G01R1/067;G01R1/073;G01R31/28;(IPC1-7):G01R31/02 |
主分类号 |
G01R1/067 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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