| 摘要 |
PROBLEM TO BE SOLVED: To efficiently and speedily detect the center of a wafer, and notches, orientation flat, or the like formed at one portion of a substrate. SOLUTION: In an aligner apparatus having a position detection sensor in which an emission section 20A and a light reception section 20B are arranged at a position, a grip chuck arm crosses a light axis L<SB>1</SB>and a light axis L<SB>2</SB>of a bundle of rays transmitted through the notch position of the wafer 1 retained by the grip chuck arm for detection. Light-emitting elements 22, 23 for generating at least two bundles of rays set to a different light axis angle, and light receiving elements 26, 27 for receiving and detecting each bundle of rays, are arranged between the emission 20A and the light reception 20B. COPYRIGHT: (C)2005,JPO&NCIPI |
