AIR FLOW CONTROL SYSTEM FOR CLEAN ROOM

摘要

PROBLEM TO BE SOLVED: To provide an air flow control system for a clean room capable of reducing the running cost of the clean room by controlling the air flow of a plurality of air cleaners existing in the clean room to secure the proper laminar air flow of the clean room. SOLUTION: This air flow control system for the clean room comprising one or a plurality of productive devices and the plurality of air cleaners, further comprises an air cleaner control means for controlling the air flow by every air cleaner on the basis of the information on the operation of the productive device. COPYRIGHT: (C)2005,JPO&NCIPI