发明名称 METHOD FOR LTCC ZERO X-Y SHRINKAGE
摘要 An assembly includes (i) a ceramic body (e.g., a LTCC substrate) and (ii) an inert tape coupled to at least a surface of the ceramic body. A method provides, through the inert tape coupled to the surface of the ceramic body, shrinkage constraint of at least the surface of the ceramic body. The method then uncouples the inert tape from the surface of the ceramic body by performing at least an abrasive scrubbing to the assembly.
申请公布号 WO2005020319(A3) 申请公布日期 2005.04.14
申请号 WO2004IB03305 申请日期 2004.08.23
申请人 BLUM, EMMANUEL, A.;LELONG, ERIC, J., P.;C-MAC MICROCIRCUITS LIMITED 发明人 BLUM, EMMANUEL, A.;LELONG, ERIC, J., P.
分类号 H01L21/48;H01L21/68;H01L23/15;H01L23/498 主分类号 H01L21/48
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