VACUUM PROCESSING DEVICE AND TRANSPORTATION METHOD OF SUBSTRATE

摘要

PROBLEM TO BE SOLVED: To provide vacuum processing and a vacuum processing method that realize a high production efficiency. SOLUTION: The vacuum processing device comprises: a cassette stage 2 which keeps a substrate in a cassette 1 to be placed in a horizontal state; a first transportation device 13 arranged to access a plurality of cassettes 1 on the cassette stage 2 and a substrate receiving chamber 5 or a substrate taking-out chamber 6; a transportation chamber 16 configured for connection to a plurality of peripheral vacuum process chambers 11 along with the substrate receiving chamber 5 and the substrate taking-out chamber 6; and a second transportation device arranged to access all of the substrate receiving chamber 5 and the substrate taking-out chamber 6 provided in the transportation chamber 16, and of the plurality of vacuum process chambers 11. COPYRIGHT: (C)2005,JPO&NCIPI