| 摘要 |
An information recording medium, a fabrication method thereof, and a sputtering target are provided to mix oxygen with a sputtering target while mixing a small amount of oxygen with a reactive gas, thereby mass-producing media having better signal recording characteristics similar to recording layers formed by a reactive film forming method. At least recording layers(102,202) are disposed on a substrate. The recording layers(102,202) include A-O or A-O-M(A includes at least one of Te, Sb, Ge, Sn, In, Zn, Mo, and W while M includes at least one of metal, elements, semi-metal elements, or semiconductor elements). While the recording layers(102,202) are fabricated, a sputtering target including at least A-O and A and/or M is used. |
