Ultrasonic horn, and ultrasonic bonding apparatus using the ultrasonic horn

摘要

An ultrasonic bonding apparatus including an ultrasonic horn formed as a horizontally symmetrical inverse triangle having two apexes besides a lower apex facing downwards; a vibrator attached to at least one apex for inputting ultrasonic vibrations in a direction facing the lower apex; and a load applying device linked to the ultrasonic horn above the lower apex and near the symmetry axis thereof, for applying a downwards pressing load. An abutting member for pressing on the objects to be bonded is provided at the lower apex of the horn. No flexing occurs at the ultrasonic horn due to the applied load, and a uniform load and ultrasonic vibrations are applied to the entire bonding face, yielding uniform and high-quality bonding.