OPTICAL WAVEGUIDE HAVING SPECULAR SURFACE FORMED BY LASER BEAM MACHINING

摘要

An optical waveguide having a specular surface formed by laser beam machining is provided to increase a degree of freedom in an optical circuit design by performing optical coupling in various kinds of patterns at an arbitrary place. An optical waveguide(1) includes a core(3) and a cladding layer. A wall surface is formed by cutting out at least a part of the core(3) in a thickness direction of the core(3) through the irradiation of a laser beam and crosses at least a part of the core(3). The wall surface is formed with a specular surface. The irradiation of the laser beam is carried out in a direction perpendicular to an optical waveguide plane. The specular surface is perpendicular to the optical waveguide plane and inclined with respect to an extension direction of the core.