METAL INDUCED LATERAL CRYSTALLIZED POLYCRYSTALLINE LIQUID CRYSTAL DISPLAY DEVICE AND FABRICATING METHOD THEREOF

摘要

A metal included lateral crystallized polysilicon LCD(Liquid Crystal Display) and a method for fabricating the LCD are provided to obtain effective capacitance by forming an opening in a storage line on an active layer and performing metal induced lateral crystallization. An active layer(505) is formed on a substrate(500). An insulating layer(530) and a conductive layer are formed on the active layer and patterned to form a gate line and a storage line(503) including an opening. Impurity ions are implanted in high concentration into the active layer using the gate line and the storage line as a mask. A metal layer is formed on the active layer. The active layer is heated to perform metal induced lateral crystallization. Source and drain electrodes are formed on the substrate. A passivation layer is formed on the substrate. A pixel electrode is formed on the passivation layer.