发明名称 MASK FRAME ASSEMBLY FOR DEPOSITING THIN LAYER OF ORGANIC ELECTRO LUMINESCENCE DEVICE AND DEPOSITION METHOD USING THE SAME
摘要 A mask frame assembly for depositing a thin layer of an organic electroluminescence device and a deposition method using the same are provided to enhance productivity by implementing a main mask separately from an icon mask. A mask frame assembly for depositing a thin layer of an organic electroluminescence device includes a main mask(21), an icon mask(31), and a mask frame(22). The main mask(21) has plural patterns corresponding to plural unit cells. The icon mask(31) is arranged to be overlapped on the main mask(21) to be correspond to an aperture formed on the main mask(21), and have plural icon patterns. The mask frame(22) includes an aperture(27) corresponding to the main mask(21). The main mask(21) and the icon mask(31) are coupled with the mask frame(22).
申请公布号 KR20050033086(A) 申请公布日期 2005.04.12
申请号 KR20030068989 申请日期 2003.10.04
申请人 SAMSUNG SDI CO., LTD. 发明人 KIM, SEON HEE
分类号 H05B33/10;C23C14/04;C23C14/12;C23C14/50;C23C16/00;H01L51/50;H05B33/14;(IPC1-7):H05B33/10 主分类号 H05B33/10
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