发明名称 Semiconductor device with region that changes depth across the direction of current flow
摘要 N<+>-type diffusion regions, P-type diffusion region and others are formed at and near a surface of an N<->-type epitaxial layer on a p-type silicon substrate. Gate electrode portions are formed on P-type diffusion region located between N<->-type diffusion regions and N<->-type epitaxial layer with a gate insulating film therebetween. A source electrode and a drain electrode are formed. Under a field isolating film, a P-type diffusion region is formed discretely in a direction crossing a direction of a current flow in the on state. Thereby, such a semiconductor device is obtained that rising of an on resistance can be suppressed in an on state while keeping an effect of reducing an electric field.
申请公布号 US6878998(B1) 申请公布日期 2005.04.12
申请号 US20000661035 申请日期 2000.09.13
申请人 MITSUBISHI DENKI KABUSHIKI KAISHA 发明人 TERASHIMA TOMOHIDE
分类号 H01L29/73;H01L21/331;H01L21/8234;H01L27/04;H01L27/088;H01L29/06;H01L29/10;H01L29/739;H01L29/78;(IPC1-7):H01L29/76;H01L23/58;H01L27/082 主分类号 H01L29/73
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