发明名称 |
Semiconductor device with region that changes depth across the direction of current flow |
摘要 |
N<+>-type diffusion regions, P-type diffusion region and others are formed at and near a surface of an N<->-type epitaxial layer on a p-type silicon substrate. Gate electrode portions are formed on P-type diffusion region located between N<->-type diffusion regions and N<->-type epitaxial layer with a gate insulating film therebetween. A source electrode and a drain electrode are formed. Under a field isolating film, a P-type diffusion region is formed discretely in a direction crossing a direction of a current flow in the on state. Thereby, such a semiconductor device is obtained that rising of an on resistance can be suppressed in an on state while keeping an effect of reducing an electric field.
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申请公布号 |
US6878998(B1) |
申请公布日期 |
2005.04.12 |
申请号 |
US20000661035 |
申请日期 |
2000.09.13 |
申请人 |
MITSUBISHI DENKI KABUSHIKI KAISHA |
发明人 |
TERASHIMA TOMOHIDE |
分类号 |
H01L29/73;H01L21/331;H01L21/8234;H01L27/04;H01L27/088;H01L29/06;H01L29/10;H01L29/739;H01L29/78;(IPC1-7):H01L29/76;H01L23/58;H01L27/082 |
主分类号 |
H01L29/73 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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