发明名称 |
Mask for vacuum deposition and organic EL display manufactured by using the same |
摘要 |
A mask for vacuum deposition cthat is held by a mask frame is provided. The mask comprises a mask body for deposition; a guide member fixed to at least one side of the mask body for deposition; and tension applying means that, when the guide member is held by the mask frame, applies a predetermined tension to the mask body for deposition via the guide member.
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申请公布号 |
US6878208(B2) |
申请公布日期 |
2005.04.12 |
申请号 |
US20020259664 |
申请日期 |
2002.09.30 |
申请人 |
TOHOKU PIONEER CORPORATION |
发明人 |
ABIKO HIROSI |
分类号 |
C23C14/04;H01L51/00;H01L51/40;H01L51/56;(IPC1-7):C23C16/04 |
主分类号 |
C23C14/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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