发明名称 Mask for vacuum deposition and organic EL display manufactured by using the same
摘要 A mask for vacuum deposition cthat is held by a mask frame is provided. The mask comprises a mask body for deposition; a guide member fixed to at least one side of the mask body for deposition; and tension applying means that, when the guide member is held by the mask frame, applies a predetermined tension to the mask body for deposition via the guide member.
申请公布号 US6878208(B2) 申请公布日期 2005.04.12
申请号 US20020259664 申请日期 2002.09.30
申请人 TOHOKU PIONEER CORPORATION 发明人 ABIKO HIROSI
分类号 C23C14/04;H01L51/00;H01L51/40;H01L51/56;(IPC1-7):C23C16/04 主分类号 C23C14/04
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