发明名称 ANISOTROPIC CONDUCTIVITY CONNECTOR, CONDUCTIVE PASTE COMPOSITION, PROBE MEMBER, WAFER INSPECTING DEVICE, AND WAFER INSPECTING METHOD
摘要 An anisotropic conductivity connector wherein, even if the pitches between electrodes to be connected are small, the conductivity of all the connection conductive sections are favorable and insulation between adjacent connection conductive sections is reliably achieved, and the favorable conductivity can be maintained for a long term even if the connector is used repetitively in a high- temperature environment, and its application are disclosed. The connector comprises elastic anisotropic conductive films having connection conductive sections containing conductive particles and extending in the direction of thickness. The connector is characterized in that, letting the shortest width of the connection conductive sections be W and the number average particle size of the conductive particles be Dn, the ratio W/Dn of the shortest width to the number average particle size ranges from 3 to 8, and the variation factor of the particle size of the conductive particles is 50% or less.
申请公布号 KR20050033614(A) 申请公布日期 2005.04.12
申请号 KR20057001118 申请日期 2005.01.21
申请人 JSR CORPORATION 发明人 SETAKA, RYOJI
分类号 C09C1/62;C09C3/06;C09D5/24;C09D183/04;G01R1/06;G01R1/073;H01B1/00;H01B1/22;H01B5/16;H01L21/66;H01L23/498;H01R11/01;(IPC1-7):G01R1/06 主分类号 C09C1/62
代理机构 代理人
主权项
地址