| 摘要 |
A method for producing an electron source in which plural electron emission devices are connected in a matrix by plural row wirings and plural column wirings, the row wirings of a number m(=axbxc) are divided into groups G1 to Ga of a number a, and the row wirings in each group are divided into sub groups SG1 to SGb of a number b, each containing the row wirings of a number c. The deposition process is executed by voltage application by selecting the row wirings of SG1 in succession and commonly to all the groups, and such deposition process is thereafter similarly executed on the sub groups starting from SG2, whereby the deposition process for all the elements is executed by executing the deposition process for each sub group by b times.
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