CARBON NANOTUBES BASED GAS SENSOR ON MEMS STRUCTURE AND METHOD FOR FABRICATING THEREOF

摘要

A carbon nano tube gas sensor and a method for manufacturing the same are provided to minimize the size of the carbon nano tube gas sensor by directly growing the carbon nano tube in an MEMS structure. A carbon nano tube gas sensor includes a substrate, an insulation layer formed at an upper portion of the substrate and a protective layer formed at a lower portion of the substrate. A heater(3-3) and a heater electrode are formed on the insulation layer. Another insulation layer is formed on the heater(3-3). A carbon nano tube electrode(3-6) and an electrode line are formed on the insulation layer. A catalyst metal(3-8) is formed on the carbon nano tube electrode(3-6). A lower portion of the substrate is anisotropically etched.