| 摘要 |
PROBLEM TO BE SOLVED: To provide a transparent conductive film having small resistance and high transmittance. SOLUTION: This layered transparent conductive films 22, 23 are composed by oxide transparent conductive thin films 27, 28, 37 and metal thin films 26, 36 having smaller sheet resistance than that of the oxide transparent conductive thin films. Since the sheet resistance of the whole layered transparent conductive film becomes smaller by the metal thin films 26, 36 and reflection is reduced by interference of the oxide transparent conductive film, transmittance becomes high. The structure may be a three-layer structure, in which the metal thin film 26 is positioned between the oxide transparent conductive thin films 27, 28, or may be a two-layer structure in which the metal thin film 36 is positioned on the rear face of the oxide transparent conductive thin film 37. When silver thin films are used for the metal thin films 26, 36, their characteristics become especially fine, and if a corrosion inhibitor is added to the silver thin film, the corrosion resistance is enhanced. COPYRIGHT: (C)2005,JPO&NCIPI
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