| 摘要 |
PROBLEM TO BE SOLVED: To provide a method of inspecting foreign matters and/or unevenness, included inside and/or in surfaces in a nondestructive inspection, in a method of inspecting the abrasive layers of pads for abrasion. SOLUTION: A held abrasive layer or an abrasive pad is irradiated with radiation. By determining the quality of the abrasive layer on the basis of the state of transmitted radiation, inspect foreign matters and/or unevenness included inside and/or in surfaces can be inspected nondestructively. COPYRIGHT: (C)2005,JPO&NCIPI
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