| 摘要 |
PROBLEM TO BE SOLVED: To form a coating film on a disc-shaped article to be treated with good work efficiency. SOLUTION: This slit coating apparatus 100 is equipped with a coating head 120 for supplying a coating solution to the disc-shaped article 10 to be treated from a nozzle having a slit, a rotary motor 102 for rotating the article 10 to be treated, a revolving motor 109 for revolving the coating head 120 in the direction horizontal with respect to the surface of the article 10 to be treated and an up and down motor 113 for moving the coating head 120 up and down in the direction vertical to the surface of the article 10 to be treated. Since the coating head 120 is three-dimensionally moved by two motors 109 and 113, the article 10 to be treated is set to the slit coating apparatus 100 and, when the article 10 to be treated is discharged from the slit coating apparatus 100, the coating head 120 or the like does not become an obstacle. COPYRIGHT: (C)2005,JPO&NCIPI
|
