发明名称 |
Device and method for plane-parallel orientation of a the surface of an object to be examined in relation to a focus plane of a lens |
摘要 |
The orientation of the surface of an object to be examined is changed by adjusting the distance thereof to an optical measuring system in a plane-parallel manner in relation to a focusing plane of the optical measuring system, enabling high speeds of examination to be obtained during examination of the extended surfaces of the object. A distance-measurement system which is mounted in an auxiliary manner with regard to the measuring head enables fluctuations in the topography inside the surface of the object to be compensated in such a way that a currently received point or area can be optically sharpened.
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申请公布号 |
US2005072944(A1) |
申请公布日期 |
2005.04.07 |
申请号 |
US20040490053 |
申请日期 |
2004.03.19 |
申请人 |
GERHARD DETLEF;LECHNER JOHANNES |
发明人 |
GERHARD DETLEF;LECHNER JOHANNES |
分类号 |
G01N21/95;G02B21/24;(IPC1-7):H01J40/14;G01N21/86 |
主分类号 |
G01N21/95 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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