| 摘要 |
PROBLEM TO BE SOLVED: To provide a film housing cassette that can efficiently supply a sheet film without through any operator in a thin film forming device which forms a thin film on a substrate by using the sheet film. SOLUTION: The film housing cassette 71 houses a plurality of sheet films F in its main body 711 in a state where mold release sheets SH are respectively interposed among the sheet films F. In the main body 711, in addition, three positioning pins 712 are erected to position the sheet films F and mold release sheets SH housed in the main body 711 against the main body 711, in a state where the pins 712 are engaged with the peripheral edges of the films F and sheets SH. Consequently, the sheet films F and mold release sheets SH are always housed in the main body 711 in an aligned state, and the take-out and supply of the sheet films F from and to the main body 711 can be performed satisfactorily. COPYRIGHT: (C)2005,JPO&NCIPI |
