| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for removing foreign matter on a capacity type dynamic quantity sensor capable of removing foreign matter existing in a hollow beneath a movable part. SOLUTION: The capacity type acceleration sensor comprises a movable part 10 consisting of movable electrodes 11, 12, a bob 13 and a spring part 14 on a semiconductor substrate 1 and displaced by impressing acceleration, and fixed parts 20, 30 with fixed electrodes 21, 31 having detection surface facing the detection surface of the moving electrodes 11, 12. By impressing a specific drive voltage in between the movable part 10 and the fixed parts 20, 30, the movable part 10 is forcedly displaced. A foreign matter 70 hidden in a hollow 16 between the movable part 10 and the semiconductor substrate 1 beneath the movable part is exposed and the foreign matter 70 is removed by a suction means 80 and the like. COPYRIGHT: (C)2005,JPO&NCIPI |
