| 摘要 |
PROBLEM TO BE SOLVED: To provide a storage container for a gas or a liquid which is liable to cause a decomposition such as a disproportionation or a hydrolysis reaction. SOLUTION: In this metal container for filling and storing a high purity gas or liquid which is liable to cause the decomposition such as the disproportionation or the hydrolysis reaction, at least a valve is installed for taking out the gas or liquid in a gas state. The inner surface of the container is treated with silane coupling agent. The high purity gas is a trimethyl silane or a monomethyl silane. COPYRIGHT: (C)2005,JPO&NCIPI
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