| 发明名称 |
Device for measuring a force; device for measuring a pressure; and pressure sensor |
| 摘要 |
A device for measuring a force, for example a pressure in a predefined direction, wherein a substrate is provided with a main substrate plane, and the direction is parallel to the main substrate plane.
|
| 申请公布号 |
US2005072247(A1) |
申请公布日期 |
2005.04.07 |
| 申请号 |
US20030648505 |
申请日期 |
2003.08.25 |
| 申请人 |
REINHART KARL-FRANZ;DOERING CHRISTIAN;STOLL OLIVER;KNAUSS MICHAEL |
发明人 |
REINHART KARL-FRANZ;DOERING CHRISTIAN;STOLL OLIVER;KNAUSS MICHAEL |
| 分类号 |
G01L1/18;G01L9/00;G01L23/18;H01L29/84;(IPC1-7):G01L1/00 |
主分类号 |
G01L1/18 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
