| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a small-sized concentration cell type oxygen sensor having good measuring precision and simply manufactured to contribute to cost reduction and capable of taking out stable electromotive force, and to provide a manufacturing method therefor. <P>SOLUTION: A thin disc of zirconia containing 8 mol% of yttrium oxide (Y<SB>2</SB>O<SB>3</SB>) is used as an oxygen ion conductor 2, and a platinum electrode 6 and an external lead 7 are formed to both sides thereof. On the other hand, a zirconia plate containing 0-3 mol% of yttrium oxide is used as a sealant 4 and a recessed part 8 is formed to the central part of one surface of the sealant 4 and an internal lead extraction groove 10 is formed to the peripheral edge part to form the sealant 4. After the recessed part 8 of the sealant 4 is filled with a reference electrode 3 containing Pd-PdO and 1-5 mol% of a YSZ powder for preventing sintering, one side of the oxygen ion conductor 2 and the forming surface of the recessed part 8 of the sealant 4 are sealed with glass 11 to hemetically seal the reference electrode 3. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
