| 摘要 |
PROBLEM TO BE SOLVED: To provide a polishing method for polishing an optical element or a die for forming the optical element by correcting shape errors of the surface to be polished, and further to provide the die or the optical element or an optical scanning unit. SOLUTION: A polishing apparatus 1 polishes a workpiece P so as to give a curved surface by controlling a polishing tool 2, which is attached to a spindle and has a specified radius of curvature, while applying a specified load to the workpiece according to a polishing control command and turning the tool at a specified peripheral speed. The polishing apparatus 1 acquires the removal efficiency variation of the polishing tool 2 for at least one of the polishing time or the moving distance of the polishing tool 2 from the polishing results in the preceding polishing process for the workpiece, the removal efficiency of the polishing tool 2 being defined as the removed depth of the workpiece P by the polishing tool 2 per a unit time. Then, the polishing apparatus 1 generates a polishing control command value in the following polishing process from the shape errors to be removed and the removal efficiency variation. As a result, the polishing process for giving a high shape accuracy is carried out at a reduced number of repetition. COPYRIGHT: (C)2005,JPO&NCIPI
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