| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for a washing material capable of excellently and effectively washing a member to be washed such as a substrate. SOLUTION: A supercooling liquid jet orifice 9 is provided to the upper part of a washing material manufacturing container 5 and a washing material storage region 11 communicating with a washing material supply passage 7 is formed to the lower part of the washing material manufacturing container 5 while a supercooling liquid 1c, which is obtained by cooling a raw material liquid being a water or a mixed liquid of water and an organic compound liquid the coagulation point of which is lower than that of water to a supercooling state, is ejected from the supercooling liquid jet orifice 9 to be allowed to impinge against the liquid surface 11a of the washing material storage region 11 to change a part of the ejected supercooling liquid 1c to ice particles 1d not only to obtain the solid-liquid coexisting sherbed-like washing material 1, wherein ice particles 1d and a liquid 1e are mixed, but also to allow the obtained washing material 1 to flow out to the washing material supply passage 7 from the washing material storage region 11. COPYRIGHT: (C)2005,JPO&NCIPI
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