| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To enable remarkable increase of capacitance and microfabrication by making a capacitor of perpendicular structure. <P>SOLUTION: Structure constituted of an electrode material film formed thick to a substrate, a clearance formed narrowly to the thickness of the electrode material film and an insulating film 3 embedded in the clearance is formed. From the structure body, counterelectrodes 4, 5 of lot are formed. Wiring 8 is connected with the counterelectrode through plugged 7, thereby constituting a capacitor. <P>COPYRIGHT: (C)2005,JPO&NCIPI</p> |
