| 摘要 |
PROBLEM TO BE SOLVED: To provide a microscope stage which allows a specimen to be reliably aligned even when the specimen is observed with high magnifications and is small-sized and can be made inexpensive. SOLUTION: In the microscope stage having a middle stage 12 and an upper stage 14 which can move in directions orthogonal to each other, a moving member 16 which can move in the respective moving directions of the middle stage 12 and the upper stage 14 is provided in a recessed part 141 provided on the upper surface of the upper stage 14, and the extent of movement of the moving member 16 in the recessed part 141 is finely adjusted by using fine movement handles 17 and 18 and plungers 21 and 26. COPYRIGHT: (C)2005,JPO&NCIPI
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