| 摘要 |
PROBLEM TO BE SOLVED: To provide a liquid jet head in which a channel forming substrate and a nozzle plate can be adequately bonded with each other, a method of manufacturing the same, and a liquid jet device. SOLUTION: A protection substrate 30 having a piezoelectric element holding section 31 for protecting a piezoelectric element 300 is bonded to a channel forming substrate 10 at the face of the side of the piezoelectric element 300, and a nozzle plate 20 having a nozzle opening 21 formed thereon is bonded to the channel forming substrate 10 at the face opposite to the protection substrate 30. A thickness of the channel forming substrate 10 at a region opposite to at least the piezoelectric element holding section 31 is made to be greater than a thickness of a region corresponding to the outside of the piezoelectric element holding section 31. COPYRIGHT: (C)2005,JPO&NCIPI
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