| 摘要 |
PROBLEM TO BE SOLVED: To reliably prevent the impurity contamination into molten metal, in a casting apparatus for producing a polycrystal silicon ingot, etc., under an inert gas atmosphere. SOLUTION: This casting apparatus is provided with: a mold 2 for holding molten metal 7 and having an opening part at the upper part; a gas tube 5 for supplying inert gas 8 toward the surface of the molten metal 7; and a cover 6 having an inserting hole 6a for inserting the gas tube 5 and fitted to the opening part of the mold 2. In a state the cover 6 is fitted to the opening part of the mold 2, a plurality of gaps 14, 14, etc., for communicating the inner part and outer part of the mold 2 are provided. The total area of the plurality of gaps 14, 14, etc., is set to≤5% of the area of the opening part in the mold 2. All of the maximum outer diameters of respective inscribed circles of the plurality of gaps 14, 14, etc., are set to≥2 mm. COPYRIGHT: (C)2005,JPO&NCIPI
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