| 摘要 |
PROBLEM TO BE SOLVED: To provide an inexpensive substrate storage case of excellent cleaning property and drying property of a case itself which is capable of preventing a substrate from being damaged or polluted by internal dust in the case where the substrate such as a photo mask is stored, maintained and carried, easily handled and capable of suppressing dust generation when the substrate is taken in/taken out. SOLUTION: In the substrate storage case 1 in which an upper lid 2 and a lower lid 3 are connected to each other via a hinge 4 in an opening/closing manner, supporting parts 5 and 6 of a substrate 7 protruded from an inner surface of each lid are provided on four corners of the upper lid 2 and the lower lid 3. The substrate 7 is simultaneously positioned at and supported by the supporting part 6 of the lower lid 3 by each two edges on the lower surface side of the four corners of the substrate 7, and each two edges on the upper surface side of the four corners of the substrate 7 are fixed by the supporting part 5 of the upper lid 2 by closing the upper lid 2 to store the substrate 7. COPYRIGHT: (C)2005,JPO&NCIPI
|
