| 摘要 |
PROBLEM TO BE SOLVED: To measure light irradiation energy in a chamber body irradiated from a light irradiation part upon heat treatment. SOLUTION: A heat treatment apparatus 1 comprises the chamber body 6, a holding unit 7 for holding a substrate 9 in the chamber body 6, the light irradiation unit 5 for heating the substrate 9 by irradiating it with light, and a light measuring unit 2 for measuring the energy of light. The light measuring unit 2 comprises a calorimeter 24 disposed outside the chamber body 6, a light lead-out structure 20 for leading the light from within the chamber body 6 to the calorimeter 24, and a computing unit 25 for carrying out computation based on the output from the calorimeter 24. In the heat treatment apparatus 1, the light from the light irradiation unit 5 is measured by the calorimeter 24, so that the light irradiation energy in the chamber body 6 irradiated from the light irradiation unit 5 upon heat treatment can be measured to obtain the surface temperature of the substrate 9 by the computing unit 25. COPYRIGHT: (C)2005,JPO&NCIPI
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