| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film capacitor in which the breakdown voltage is high between upper and lower electrodes and short circuit is eliminated between them. SOLUTION: In the thin film capacitor, the upper thin film part 3a of a first dielectric thin film 3 is formed on the upper surface 2a of a lower electrode 2 and the upper thin film part 4a of a second dielectric film 4 formed on the upper thin film part 3a is provided with an inclining plane. Since an upper electrode 6 becomes low at a part touching the end part of the upper thin film 4a and the upper thin film part 3a of the first dielectric thin film 3, concentration of electric field is prevented between that part and the upper surface 2a of the lower electrode 2. Since migration of copper ions from the upper electrode 6 is reduced in the upper thin film part 3a of the first dielectric thin film 3, breakdown voltage is elevated between the lower electrode 2 and the upper electrode 6 and short circuit can be eliminated between the lower electrode 2 and the upper electrode 6. COPYRIGHT: (C)2005,JPO&NCIPI
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