| 摘要 |
PROBLEM TO BE SOLVED: To provide a valve for chemical solution enabling an increase in sealability and preventing air bubbles from stagnating therein. SOLUTION: This valve is installed in a flow passage for flowing a fluid, and operates a diaphragm valve element 15 to bring it in contact with or separate it from a valve seat 14 so as to control the supply of the fluid. The diaphragm valve element 15 and a suck back diaphragm valve element 16 are operated integrally with each other. The device also comprises a connection rod 11 having one end connected to the suck back diaphragm valve element 16 and the other end 11a formed in a spherical shape and brought into contact with the diaphragm valve element 15. COPYRIGHT: (C)2005,JPO&NCIPI
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