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发明名称
METHOD OF PRODUCING SELF-SUPPORTING SUBSTRATES COMPRISING III-NITRIDES BY MEANS OF HETEROEPITAXY ON A SACRIFICIAL LAYER
摘要
申请公布号
CA2540245(A1)
申请公布日期
2005.04.07
申请号
CA20042540245
申请日期
2004.09.24
申请人
CENTRE NATIONAL DE LA RECHERCHE SCIENTIFIC (C.N.R.S.)
发明人
BOUGRIOUA, ZAHIA;FELTIN, ERIC PASCAL;NATAF, GILLES
分类号
C30B25/18;C30B25/02;C30B29/40;H01L21/20
主分类号
C30B25/18
代理机构
代理人
主权项
地址
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