| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a sensor capable of reducing a macro thermal influence in formation and capable of enhancing measuring precision, by constituting electrode taking-out structure by a wiring member formed by a flame spraying method, and a method for taking out an electrode of the sensor. <P>SOLUTION: Metal powder 30 comprising a fine conductive material fused by a plasma spraying device 45 is plasma-sprayed toward an electrode taking-out hole 7b to form the second wiring member 24. The second wiring member 24 is formed of an accumulation layer of the metal powder 30 accumulated serially continuously on an outer face of the first substrate 2, on an inner face of the electrode taking-out hole 7b, on a cavity space between the electrode taking-out hole 7b and a movable electrode 6, and on a surface of the movable electrode 6, and the movable electrode 6 is thereby drawn out on the outer face of the first substrate 2. <P>COPYRIGHT: (C)2005,JPO&NCIPI |
