THIN FILM TRANSISTOR SUBSTRATE AND ITS MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a thin film transistor substrate that suppresses heat generation in light projection to reduce image defects caused owing to strain of a substrate due to heat generation. SOLUTION: An upper electrode 12 connected to a pixel electrode 95 has a high-fusion-point metal layer 12b as its top layer and an Al metal layer 12a consisting mainly of Al as the 2nd layer from the top at least in an area where it is connected to the pixel electrode 95. In other areas, the high-fusion-point layer 12b is not formed and the top layer is an Al metal layer 12a consisting mainly of Al with high reflectivity. COPYRIGHT: (C)2005,JPO&NCIPI