| 摘要 |
PROBLEM TO BE SOLVED: To reduce the variance of the resonance frequency of a vibration mirror and to broaden the range of absorbing the variance of a driving frequency. SOLUTION: A mass variation part 4 (a gas adsorbent or a gas release agent) is formed on the vibration mirror 2 of a micromirror 1. The mass of the vibration mirror 2 increases and the resonance frequency drops by adsorbing gas in a structure in which the vibration mirror 2 is provided with the mass variation part 4 which adsorbs the gas. Thus, the variance in the resonance frequency which arises in manufacturing the vibration mirror is absorbed and reduced. COPYRIGHT: (C)2005,JPO&NCIPI
|
