| 摘要 |
PROBLEM TO BE SOLVED: To provide a small-sized high-sensitivity magnetic sensor utilizing a magnetostrictive effect. SOLUTION: This magnetic sensor is constituted of a vibrating body 12 formed from magnetic thin films 11 serving simultaneously as the first electrode 10 and a magnetic film holding substrate, a substrate 14 for supporting the vibrating body 12 formed by laminating the magnetic thin films, and the second electrode 13 arranged on the position opposite to the vibrating body 12. In the sensor, the Young's modulus of the magnetic thin films 11 is changed by the magnetostrictive effect following the change of an external magnetic field in the state where the vibrating body 12 is mechanically vibrated integrally by an electrostatic force generated by a driving voltage applied between the first electrode 10 and the second electrode 13. Therefore, a mechanical resonance frequency of the vibrating body 12 is changed, and a variation of the resonance frequency is used as an output to the external magnetic field based on a detection voltage generated between the first electrode 10 and the second electrode 13. COPYRIGHT: (C)2005,JPO&NCIPI
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